THINH, Lam Minh; TRUONG, Phan Minh; THANG, Trinh Xuan; THANH, Ngo Vo Ke; CUONG, Le Quoc; CUONG, Nguyen Chi. Investigation on effect of surface roughness pattern to dynamic performance of mems resonators in various types of gases and gas rarefaction. <b>Vietnam Journal of Science and Technology</b>, Hanoi, VN, v. 59, n. 5, p. 643–661, 2021. DOI: 10.15625/2525-2518/59/5/15478. Disponível em: https://vjst.vast.vn/jst/article/view/15478. Acesso em: 1 jun. 2026.